Characterization of sputtered TiO2 gate dielectric on aluminum oxynitride passivated p-GaAs

Title
Characterization of sputtered TiO2 gate dielectric on aluminum oxynitride passivated p-GaAs
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 3, Pages 034508
Publisher
AIP Publishing
Online
2008-02-15
DOI
10.1063/1.2840132

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