Neutral depletion in inductively coupled plasmas using hybrid-type direct simulation Monte Carlo

Title
Neutral depletion in inductively coupled plasmas using hybrid-type direct simulation Monte Carlo
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 3, Pages 033304
Publisher
AIP Publishing
Online
2008-02-15
DOI
10.1063/1.2836938

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