Controlled fabrication of Cr∕Si and Cr∕SiGe tubes tethered to insulator substrates

Title
Controlled fabrication of Cr∕Si and Cr∕SiGe tubes tethered to insulator substrates
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 11, Pages 116103
Publisher
AIP Publishing
Online
2008-06-09
DOI
10.1063/1.2930996

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