Surface reconstruction evolution and anatase formation in the process of oxidation of titanium nitride film

Title
Surface reconstruction evolution and anatase formation in the process of oxidation of titanium nitride film
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 6, Pages 063517
Publisher
AIP Publishing
Online
2008-03-27
DOI
10.1063/1.2899179

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