Permanent reduction of dissipation in nanomechanical Si resonators by chemical surface protection

Published 2015 View Full Article

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Title
Permanent reduction of dissipation in nanomechanical Si resonators by chemical surface protection
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 26, Issue 46, Pages 465501
Publisher
IOP Publishing
Online
2015-10-27
DOI
10.1088/0957-4484/26/46/465501

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