Journal
NANOTECHNOLOGY
Volume 26, Issue 4, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/26/4/042001
Keywords
nanofabrication; lithography; large area production
Funding
- Australian Research Council (ARC) [DE140100549]
- Spanish Ministerio de Economia y Competitividad [TEC2012-34397]
- Generalitat de Catalunya [SGR 1344]
- Canada Research Chair program
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In the last decade, some low-cost nanofabrication technologies used in several disciplines of nanotechnology have demonstrated promising results in terms of versatility and scalability for producing innovative nanostructures. While conventional nanofabrication technologies such as photolithography are and will be an important part of nanofabrication, some low-cost nanofabrication technologies have demonstrated outstanding capabilities for large-scale production, providing high throughputs with acceptable resolution and broad versatility. Some of these nanotechnological approaches are reviewed in this article, providing information about the fundamentals, limitations and potential future developments towards nanofabrication processes capable of producing a broad range of nanostructures. Furthermore, in many cases, these low-cost nanofabrication approaches can be combined with traditional nanofabrication technologies. This combination is considered a promising way of generating innovative nanostructures suitable for a broad range of applications such as in opto-electronics, nano-electronics, photonics, sensing, biotechnology or medicine.
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