Towards a full integration of vertically aligned silicon nanowires in MEMS using silane as a precursor

Published 2015 View Full Article

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Title
Towards a full integration of vertically aligned silicon nanowires in MEMS using silane as a precursor
Authors
Keywords
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Journal
NANOTECHNOLOGY
Volume 26, Issue 19, Pages 195302
Publisher
IOP Publishing
Online
2015-04-23
DOI
10.1088/0957-4484/26/19/195302

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