Multilayer thin-film coatings based on chromium nitride and aluminum nitride: Comparative depth profiling by secondary ion mass spectrometry and glow-discharge optical emission spectrometry

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Title
Multilayer thin-film coatings based on chromium nitride and aluminum nitride: Comparative depth profiling by secondary ion mass spectrometry and glow-discharge optical emission spectrometry
Authors
Keywords
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Journal
JOURNAL OF ANALYTICAL CHEMISTRY
Volume 65, Issue 13, Pages 1370-1376
Publisher
Pleiades Publishing Ltd
Online
2010-12-01
DOI
10.1134/s1061934810130101

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