Journal
JOURNAL OF ANALYTICAL AND APPLIED PYROLYSIS
Volume 97, Issue -, Pages 94-98Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jaap.2012.05.005
Keywords
CVD; Nanomaterials; Oxycarbides; Germanium; Nanowires; Nanotubes
Funding
- Grant Agency of the Czech Republic [GACR 203/09/1088]
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The silicon oxycarbide Si/O/C nanotubes were prepared by two-step procedure. First, a nanostructure deposit mainly composed of nanocables with germanium core was synthetized by low pressure chemical vapor deposition (LPCVD) using hexamethyldigermane Ge2Me6 and 1,1,3,3-tetramethyldisilazane (Me2SiH)(2)NH as the volatile precursors. Second. LPCVD was followed by annealing at 850 degrees C in vacuum to evaporate germanium core. As a result Si/O/C nanotubes were formed. Various techniques such as Raman spectroscopy, TEM, SEM/EDX, XPS and HRTEM were used to study the physical and chemical properties. (C) 2012 Elsevier B.V. All rights reserved.
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