Effects of rapid thermal annealing on Hf-doped ZnO films grown by atomic layer deposition

Published 2013 View Full Article

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Title
Effects of rapid thermal annealing on Hf-doped ZnO films grown by atomic layer deposition
Authors
Keywords
-
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 577, Issue -, Pages 340-344
Publisher
Elsevier BV
Online
2013-06-05
DOI
10.1016/j.jallcom.2013.05.181

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