Electrical and optical properties of tantalum oxide thin films prepared by reactive magnetron sputtering

Published 2011 View Full Article

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Title
Electrical and optical properties of tantalum oxide thin films prepared by reactive magnetron sputtering
Authors
Keywords
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Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 509, Issue 41, Pages 9758-9763
Publisher
Elsevier BV
Online
2011-08-15
DOI
10.1016/j.jallcom.2011.08.019

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