High-resolution and large-area nanoparticle arrays using EUV interference lithography

Title
High-resolution and large-area nanoparticle arrays using EUV interference lithography
Authors
Keywords
-
Journal
Nanoscale
Volume 7, Issue 16, Pages 7386-7393
Publisher
Royal Society of Chemistry (RSC)
Online
2015-03-23
DOI
10.1039/c5nr00565e

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