Effect of growth and annealing temperatures on crystallization of tantalum pentoxide thin film prepared by RF magnetron sputtering method

Published 2008 View Full Article

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Title
Effect of growth and annealing temperatures on crystallization of tantalum pentoxide thin film prepared by RF magnetron sputtering method
Authors
Keywords
-
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 475, Issue 1-2, Pages 488-493
Publisher
Elsevier BV
Online
2008-10-24
DOI
10.1016/j.jallcom.2008.07.126

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