High power pulsed magnetron sputtering: Fundamentals and applications

Published 2008 View Full Article

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Title
High power pulsed magnetron sputtering: Fundamentals and applications
Authors
Keywords
-
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 483, Issue 1-2, Pages 530-534
Publisher
Elsevier BV
Online
2008-12-21
DOI
10.1016/j.jallcom.2008.08.104

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