Prediction of Real Contact Area from Microtopography on CMP Pad

Published 2012 View Full Article

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Title
Prediction of Real Contact Area from Microtopography on CMP Pad
Authors
Keywords
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Journal
Journal of Advanced Mechanical Design Systems and Manufacturing
Volume 6, Issue 1, Pages 113-120
Publisher
Japan Society of Mechanical Engineers
Online
2012-01-31
DOI
10.1299/jamdsm.6.113

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