An ultrabroad band omni-directional anti-reflective coating with quasi-gradient refractive index distribution based on Si–SiOxNy–SiO2materials system

Published 2014 View Full Article

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Title
An ultrabroad band omni-directional anti-reflective coating with quasi-gradient refractive index distribution based on Si–SiOxNy–SiO2materials system
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 53, Issue 2, Pages 021501
Publisher
IOP Publishing
Online
2014-01-21
DOI
10.7567/jjap.53.021501

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