Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets: Control of precursor flow

Title
Physics on development of open-air atmospheric pressure thin film fabrication technique using mist droplets: Control of precursor flow
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 53, Issue 5S1, Pages 05FF08
Publisher
Japan Society of Applied Physics
Online
2014-04-25
DOI
10.7567/jjap.53.05ff08

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