Effects of combined Ar/O2plasma and microwave irradiation on electrical performance and stability in solution-deposited amorphous InGaZnO thin-film transistors

Title
Effects of combined Ar/O2plasma and microwave irradiation on electrical performance and stability in solution-deposited amorphous InGaZnO thin-film transistors
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 53, Issue 4S, Pages 04EF12
Publisher
IOP Publishing
Online
2014-03-29
DOI
10.7567/jjap.53.04ef12

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