Characteristics of pulsed dual frequency inductively coupled plasma

Published 2014 View Full Article

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Title
Characteristics of pulsed dual frequency inductively coupled plasma
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 54, Issue 1S, Pages 01AA10
Publisher
Japan Society of Applied Physics
Online
2014-12-19
DOI
10.7567/jjap.54.01aa10

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