Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 53, Issue 4, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.7567/JJAP.53.04EB03
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- Grants-in-Aid for Scientific Research [25820125] Funding Source: KAKEN
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Silver (Ag) electrodes printed on amorphous indium gallium zinc oxide (a-InGaZnO) were investigated to analyze their effect on thin-film transistor (TFT) characteristics. The TFT characteristics of samples annealed at 250 degrees C deteriorated seriously owing to an aggregation of Ag. In addition, the TFT characteristics deteriorated even for 200 degrees C annealing with oxygen and nitrogen atmospheres. From measurements of secondary ion mass spectrometry and Fourier transform infrared spectroscopy, we found that carbon and hydrogen contained in printed Ag electrodes seriously affect the TFTcharacteristics. The reduction and protection against these impurities in Ag ink is the key point in the application of printed Ag electrodes to a-InGaZnO TFTs. (C) 2014 The Japan Society of Applied Physics
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