Preparation of [100] oriented SrTiO3 thin films on flexible polymer sheets

In this study, we prepared a uniaxially oriented oxide on a flexible polymer substrate. We first grew [100] oriented SrTiO3 (STO) on a MgO(100) substrate. After bonding the STO film to a poly(ethylene naphthalete) (PEN) sheet with a photoresist, we etched the MgO substrate with a phosphoric acid solution to transfer the oxide film to the PEN sheet. The thin (300nm) STO films did not crack after release, even after bending the sheet around a rod with a 1cm radius, while the thicker (800 nm) films did. Ultimately, this process could be adapted to prepare a flexible epitaxial oxide. (C) 2014 The Japan Society of Applied Physics