Nucleation Control of Carbon Nanowalls Using Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition

Published 2013 View Full Article

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Title
Nucleation Control of Carbon Nanowalls Using Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 52, Issue 1S, Pages 01AK05
Publisher
IOP Publishing
Online
2013-01-24
DOI
10.7567/jjap.52.01ak05

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