Chemical Bonding in Composite SiNx/Diamond-Like Carbon Films Prepared by Filter Cathodic Arc Deposition of Graphite Incorporated with Radio Frequency Sputtering of Silicon Nitride

Published 2013 View Full Article

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Title
Chemical Bonding in Composite SiNx/Diamond-Like Carbon Films Prepared by Filter Cathodic Arc Deposition of Graphite Incorporated with Radio Frequency Sputtering of Silicon Nitride
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 52, Issue 9R, Pages 095501
Publisher
IOP Publishing
Online
2013-08-12
DOI
10.7567/jjap.52.095501

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