Electrical Resistivity Measurements of Layer Number Determined Multilayer Graphene Wiring for Future Large Scale Integrated Circuit Interconnects

Published 2013 View Full Article

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Title
Electrical Resistivity Measurements of Layer Number Determined Multilayer Graphene Wiring for Future Large Scale Integrated Circuit Interconnects
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 52, Issue 6S, Pages 06GD08
Publisher
IOP Publishing
Online
2013-06-20
DOI
10.7567/jjap.52.06gd08

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