Preparation of Naturally Textured Aluminum-Doped Zinc Oxide Films on Flexible Poly(ether sulfone) Substrate by Radio Frequency Magnetron Sputtering

Published 2013 View Full Article

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Title
Preparation of Naturally Textured Aluminum-Doped Zinc Oxide Films on Flexible Poly(ether sulfone) Substrate by Radio Frequency Magnetron Sputtering
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 52, Issue 3R, Pages 031101
Publisher
IOP Publishing
Online
2013-03-02
DOI
10.7567/jjap.52.031101

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