Process Optimization for Synthesis of High-Quality Graphene Films by Low-Pressure Chemical Vapor Deposition

Title
Process Optimization for Synthesis of High-Quality Graphene Films by Low-Pressure Chemical Vapor Deposition
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 51, Issue 6S, Pages 06FD21
Publisher
Japan Society of Applied Physics
Online
2013-12-21
DOI
10.7567/jjap.51.06fd21

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