Development of Original End Point Detection System Utilizing Eddy Current Variation Due to Skin Effect in Chemical Mechanical Polishing

Published 2013 View Full Article

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Title
Development of Original End Point Detection System Utilizing Eddy Current Variation Due to Skin Effect in Chemical Mechanical Polishing
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 50, Issue 5S1, Pages 05EC09
Publisher
Japan Society of Applied Physics
Online
2013-12-21
DOI
10.7567/jjap.50.05ec09

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