Effect of Hydrogen on Carbon Nanowall Growth by Microwave Plasma-Enhanced Chemical Vapor Deposition

Published 2013 View Full Article

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Title
Effect of Hydrogen on Carbon Nanowall Growth by Microwave Plasma-Enhanced Chemical Vapor Deposition
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 50, Issue 1S1, Pages 01AF08
Publisher
Japan Society of Applied Physics
Online
2013-12-21
DOI
10.7567/jjap.50.01af08

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