Advanced Organic Polymer for the Aggressive Scaling of Low-kMaterials

Published 2011 View Full Article

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Title
Advanced Organic Polymer for the Aggressive Scaling of Low-kMaterials
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 50, Issue 4, Pages 04DB01
Publisher
Japan Society of Applied Physics
Online
2011-04-26
DOI
10.1143/jjap.50.04db01

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