Improvement of Piezoelectric Properties of (K,Na)NbO3Films Deposited by Sputtering

Published 2011 View Full Article

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Title
Improvement of Piezoelectric Properties of (K,Na)NbO3Films Deposited by Sputtering
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 50, Issue 4, Pages 041503
Publisher
Japan Society of Applied Physics
Online
2011-04-20
DOI
10.1143/jjap.50.041503

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