Control of Structure and Film Thickness Using Spray Layer-by-Layer Method: Application to Double-Layer Anti-Reflection Film

Published 2011 View Full Article

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Title
Control of Structure and Film Thickness Using Spray Layer-by-Layer Method: Application to Double-Layer Anti-Reflection Film
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 50, Issue -, Pages 035803
Publisher
Japan Society of Applied Physics
Online
2011-03-29
DOI
10.1143/jjap.50.035803

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