Analysis of GaN Damage Induced by Cl2/SiCl4/Ar Plasma

Published 2013 View Full Article

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Title
Analysis of GaN Damage Induced by Cl2/SiCl4/Ar Plasma
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 50, Issue 8S1, Pages 08JE03
Publisher
Japan Society of Applied Physics
Online
2013-12-21
DOI
10.7567/jjap.50.08je03

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