Fluorine Penetration into Amorphous SiO2Glass at SF6Atmosphere Using Q-Switched Nd:YAG and Excimer Laser Irradiations

Title
Fluorine Penetration into Amorphous SiO2Glass at SF6Atmosphere Using Q-Switched Nd:YAG and Excimer Laser Irradiations
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 49, Issue 7, Pages 075803
Publisher
Japan Society of Applied Physics
Online
2010-07-20
DOI
10.1143/jjap.49.075803

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