High-Performance Transparent Conducting Ga-Doped ZnO Films Deposited by RF Magnetron Sputter Deposition

Published 2010 View Full Article

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Title
High-Performance Transparent Conducting Ga-Doped ZnO Films Deposited by RF Magnetron Sputter Deposition
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 49, Issue 4, Pages 04DP09
Publisher
Japan Society of Applied Physics
Online
2010-04-20
DOI
10.1143/jjap.49.04dp09

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