Application of DC Magnetron Sputtering to Deposition of InGaZnO Films for Thin Film Transistor Devices

Published 2009 View Full Article

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Title
Application of DC Magnetron Sputtering to Deposition of InGaZnO Films for Thin Film Transistor Devices
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 48, Issue 3, Pages 031301
Publisher
Japan Society of Applied Physics
Online
2009-03-23
DOI
10.1143/jjap.48.031301

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