Nanomold Fabrication and Nanoimprint Devices Using Advanced Blu-ray Disc Technology

Published 2009 View Full Article

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Title
Nanomold Fabrication and Nanoimprint Devices Using Advanced Blu-ray Disc Technology
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 48, Issue 6, Pages 06FD04
Publisher
Japan Society of Applied Physics
Online
2009-06-22
DOI
10.1143/jjap.48.06fd04

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