Effect of Composition in Ternary La–Al–O Films on Flat-Band Voltage for Application to Dual High-kGate Dielectric Technology

Published 2009 View Full Article

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Title
Effect of Composition in Ternary La–Al–O Films on Flat-Band Voltage for Application to Dual High-kGate Dielectric Technology
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 48, Issue 5, Pages 05DA03
Publisher
Japan Society of Applied Physics
Online
2009-05-20
DOI
10.1143/jjap.48.05da03

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