Vanadium Dioxide and Vanadium Sesquioxide Thin Films Fabricated on (0001) or (10\bar10)Al2O3by Reactive RF-Magnetron Sputter Deposition and Subsequent Annealing Processes

Title
Vanadium Dioxide and Vanadium Sesquioxide Thin Films Fabricated on (0001) or (10\bar10)Al2O3by Reactive RF-Magnetron Sputter Deposition and Subsequent Annealing Processes
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 48, Issue 4, Pages 04C139
Publisher
Japan Society of Applied Physics
Online
2009-04-20
DOI
10.1143/jjap.48.04c139

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