In situGravimetric Monitoring of Thermal Decomposition and Hydrogen Etching Rates of 6H-SiC(0001) Si Face

Published 2009 View Full Article

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Title
In situGravimetric Monitoring of Thermal Decomposition and Hydrogen Etching Rates of 6H-SiC(0001) Si Face
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 48, Issue 9, Pages 095505
Publisher
Japan Society of Applied Physics
Online
2009-09-24
DOI
10.1143/jjap.48.095505

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