Synthesis and Characterization of Zinc-Doped Amorphous Carbon Films by Plasma-Assisted Organometallic Chemical Vapor Deposition

Published 2008 View Full Article

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Title
Synthesis and Characterization of Zinc-Doped Amorphous Carbon Films by Plasma-Assisted Organometallic Chemical Vapor Deposition
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 3, Pages 1694-1698
Publisher
Japan Society of Applied Physics
Online
2008-03-16
DOI
10.1143/jjap.47.1694

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