Fabrication of Hybrid Microoptics Using UV Imprinting Process with Shrinkage Compensation Method

Published 2008 View Full Article

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Title
Fabrication of Hybrid Microoptics Using UV Imprinting Process with Shrinkage Compensation Method
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 8, Pages 6719-6722
Publisher
Japan Society of Applied Physics
Online
2008-08-22
DOI
10.1143/jjap.47.6719

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