Growth of Crystalline Zinc Oxide Thin Films by Fine-Channel-Mist Chemical Vapor Deposition

Published 2008 View Full Article

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Title
Growth of Crystalline Zinc Oxide Thin Films by Fine-Channel-Mist Chemical Vapor Deposition
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 6, Pages 4669-4675
Publisher
Japan Society of Applied Physics
Online
2008-06-13
DOI
10.1143/jjap.47.4669

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