The Complex Mechanisms of Ion-Beam-Induced Deposition

Published 2008 View Full Article

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Title
The Complex Mechanisms of Ion-Beam-Induced Deposition
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 6, Pages 5123-5126
Publisher
Japan Society of Applied Physics
Online
2008-06-20
DOI
10.1143/jjap.47.5123

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