Characterization of CuAlO2Thin Films Prepared on Sapphire Substrates by Reactive Sputtering and Annealing

Published 2008 View Full Article

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Title
Characterization of CuAlO2Thin Films Prepared on Sapphire Substrates by Reactive Sputtering and Annealing
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 1, Pages 592-595
Publisher
Japan Society of Applied Physics
Online
2008-01-22
DOI
10.1143/jjap.47.592

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