Smooth and Narrow Nanopillars Fabricated by Ion-Beam-Induced Deposition under Charging Conditions

Title
Smooth and Narrow Nanopillars Fabricated by Ion-Beam-Induced Deposition under Charging Conditions
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 10, Pages 8120-8123
Publisher
Japan Society of Applied Physics
Online
2008-10-17
DOI
10.1143/jjap.47.8120

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