Thickness Dependences of Polarization Characteristics in Mn-Substituted BiFeO3 Films on Pt Electrodes

The thickness dependences of polarization characteristics have been measured for Mn-substituted BiFeO3 (BFO) films formed on Pt/Ti/SiO2/Si(100) Substrates by chemical solution deposition (CSD). X-ray diffraction (XRD) patterns have proved the existence of a dielectric phase. which is mainly formed at the initial stage of the film formation. It has been revealed that the remanent polarization (P-r) increases and the coercive electric field (E-c) decreases with increasing film thickness. It has also been found from the thickness-dependent polarization characteristics that the equivalent oxide thickness (EOT) of the dielectric layers at the interfaces and the intrinsic coercive field in the ferroelectric layers are 4.5 nm and approximately 90 kV/cm, respectively, in both 3 and 5% Mn-substituted BFO films.