4.3 Article

Temperature-dependent interface-state response in an Al2O3/n-GaN structure

Journal

JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 7, Pages 5426-5428

Publisher

JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.47.5426

Keywords

GaN; MIS; interface state; C-V; C-t; high temperature; capture cross section

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With a combination of the static capacitance-voltage (C-V) and the capacitance transient (C-t) methods. the interface-state response in in Al2O3/n-GaN structure was investigated at temperatures ranging from 23 to 300 degrees C. We observed pronounced degradation of the static C-V curves measured at high temperatures. arising front the enhancement of charging/discharging rates of interface states, at deeper energies within the bandgap of GaN. Faster responses with larger magnitudes also appeared in the time-dependent capacitance at high temperatures. From a simple analysis of the C-t results, we estimated the capture cross section of the states to be on the order 10(-19) cm(2).

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