Thermal Conductivity and Interfacial Thermal Resistance: Measurements of Thermally Oxidized SiO2 Films on a Silicon Wafer Using a Thermo-Reflectance Technique

Title
Thermal Conductivity and Interfacial Thermal Resistance: Measurements of Thermally Oxidized SiO2 Films on a Silicon Wafer Using a Thermo-Reflectance Technique
Authors
Keywords
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Journal
INTERNATIONAL JOURNAL OF THERMOPHYSICS
Volume 29, Issue 6, Pages 2062-2071
Publisher
Springer Nature
Online
2008-11-15
DOI
10.1007/s10765-008-0536-4

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