Nanomechanical study of amorphous and polycrystalline ALD HfO2 thin films

Published 2011 View Full Article

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Title
Nanomechanical study of amorphous and polycrystalline ALD HfO2 thin films
Authors
Keywords
-
Journal
International Journal of Surface Science and Engineering
Volume 5, Issue 2/3, Pages 193
Publisher
Inderscience Publishers
Online
2011-07-22
DOI
10.1504/ijsurfse.2011.041402

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