Determination of Young's modulus and yield strength of porous low-k dielectric films by nanoindentation under complete consideration of the substrate influence

Title
Determination of Young's modulus and yield strength of porous low-k dielectric films by nanoindentation under complete consideration of the substrate influence
Authors
Keywords
-
Publisher
Inderscience Publishers
Online
2009-04-02
DOI
10.1504/ijsurfse.2009.024362

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